首页> 外文会议>International Conference on Mechanical Engineering and Mechanics vol.2; 20051026-28; Nanjing(CN) >Performance Evaluation System for Scheduling Semiconductor Wafer Fabs
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Performance Evaluation System for Scheduling Semiconductor Wafer Fabs

机译:半导体晶圆厂调度性能评估系统

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摘要

With the complexity of semiconductor wafer fabs production, production schedules are released to shop floor and become an indispensable part of the factory. However, once a production schedule is made, evaluation of the schedule became the focus. As semiconductor wafer fabs is one of the most complex manufacturing production, research has traditionally focused on scheduling which considers only a few performance indices, ignoring a comprehensive systematic report about performance evaluation An evaluation system should show how well the results are from all angles if the schedules are performed and whether they satisfies the requirements of the management of a factory. After an introduction of the problem and a bibliography study, a performance evaluation system, which consists of short-term performance indices and long-term performance indices, is presented for scheduling semiconductor wafer fabs. The short-term performance indices aim to evaluate daily production plans, and include two types, i.e. product-related performances indices (such as Work In Process (WIP), Movement and Step) and equipment-related performance indices (such as Machine Utilization, Load, Queue and Rate of Bottleneck). The long-term performance indices help to analyze daily order release plans, and are composed of Average Cycle Time, Product Flow Parameter, On Time Delivery and Throughput Rate. And a real Performance-Evaluation System for scheduling Semiconductor wafer fabs was implemented to guide the actual production in semiconductor wafer industry. This developed system has been well applied in factory.
机译:随着半导体晶圆厂生产的复杂性,生产进度计划会发布到车间,并成为工厂必不可少的一部分。但是,一旦制定了生产进度表,就需要对进度表进行评估。由于半导体晶圆厂是最复杂的制造产品之一,因此传统上,研究主要集中在仅考虑少数性能指标的调度上,而忽略了有关性能评估的全面系统报告。评估系统应该从各个角度显示结果的好坏。执行时间表,以及它们是否满足工厂管理的要求。在介绍了问题并进行了书目研究之后,提出了一种由短期性能指标和长期性能指标组成的性能评估系统,用于调度半导体晶圆厂。短期绩效指标旨在评估每日生产计划,包括两种类型,即与产品相关的绩效指标(例如,在制品(WIP),移动和步进)和与设备相关的绩效指标(例如,机器利用率,瓶颈的负载,队列和速率)。长期绩效指标有助于分析每日订单下达计划,并由平均周期时间,产品流参数,准时交货和吞吐率组成。并建立了用于调度半导体晶圆厂的真实性能评估系统,以指导半导体晶圆行业的实际生产。该开发的系统已在工厂中得到很好的应用。

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