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Performance Evaluation System for Scheduling Semiconductor Wafer Fabs

机译:用于调度半导体晶片Fabs的性能评估系统

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With the complexity of semiconductor wafer fabs production, production schedules are released to shop floor and become an indispensable part of the factory. However, once a production schedule is made, evaluation of the schedule became the focus. As semiconductor wafer fabs is one of the most complex manufacturing production, research has traditionally focused on scheduling which considers only a few performance indices, ignoring a comprehensive systematic report about performance evaluation An evaluation system should show how well the results are from all angles if the schedules are performed and whether they satisfies the requirements of the management of a factory. After an introduction of the problem and a bibliography study, a performance evaluation system, which consists of short-term performance indices and long-term performance indices, is presented for scheduling semiconductor wafer fabs. The short-term performance indices aim to evaluate daily production plans, and include two types, i.e. product-related performances indices (such as Work In Process (WIP), Movement and Step) and equipment-related performance indices (such as Machine Utilization, Load, Queue and Rate of Bottleneck). The long-term performance indices help to analyze daily order release plans, and are composed of Average Cycle Time, Product Flow Parameter, On Time Delivery and Throughput Rate. And a real Performance-Evaluation System for scheduling Semiconductor wafer fabs was implemented to guide the actual production in semiconductor wafer industry. This developed system has been well applied in factory.
机译:随着半导体晶圆厂生产的复杂性,生产时间表释放到车间,成为工厂不可或缺的一部分。但是,一旦制定了生产计划,对计划的评估成为了焦点。随着半导体晶片Fabs是最复杂的制造生产之一,传统上重点关注仅考虑一些性能指标,忽略了关于绩效评估的综合系统报告,评估系统应该表明如果出现的结果是从所有角度的结果执行时间表以及它们是否满足工厂管理的要求。在引入问题和参考书目的研究之后,提出了一种由短期性能指标和长期性能指标组成的性能评估系统,用于调度半导体晶片Fab。短期性能指标旨在评估日常生产计划,并包括两种类型,即产品相关的表演指数(例如过程中的工作(WIP),移动和步骤)和设备相关的性能指数(例如机器利用率,加载,队列和瓶颈速率)。长期性能指标有助于分析日常订单释放计划,并由平均循环时间,产品流参数,按时交付和吞吐率组成。实施了用于调度半导体晶片Fabs的实际性能评估系统以指导半导体晶片工业中的实际生产。这款开发系统在工厂很好应用。

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