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Effect of Various Geometric Parameters of Inertial Component on Performance of Accelerometer

机译：惯性分量的各种几何参数对加速度计性能的影响

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摘要

A inertial component of MEMS piezoresistive accelerometer was taken as the research object to investigate the influence which caused by changing of geometry parameters of its micro elastic beam to system performance.The mechanical model was built to analyze the characteristics of max stress and displacement of the inertial component when the system was sensitive to external accelery load.The theory analysis was verified by the result of FEM simulation,and the effect on structural sensitivity and natural frequency of the inertial component with changing of geometry parameters of its micro elastic beams was studied based on the conclusions above.The conclusion could be used to conduct optimization the structure design of piezoresistive accelerometer.
机译：以MEMS压阻式加速度计的惯性分量为研究对象，研究其微弹性梁的几何参数变化对系统性能的影响。建立力学模型，分析其最大应力和惯性位移特性。通过有限元模拟的结果验证了理论分析，并研究了惯性构件对微加速度梁几何参数的变化对惯性构件结构灵敏度和固有频率的影响。该结论可用于优化压阻式加速度计的结构设计。

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