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Effect of Various Geometric Parameters of Inertial Component on Performance of Accelerometer

机译：各种几何参数的惯性组分对加速度计性能的影响

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A inertial component of MEMS piezoresistive accelerometer was taken as the research object to investigate the influence which caused by changing of geometry parameters of its micro elastic beam to system performance.The mechanical model was built to analyze the characteristics of max stress and displacement of the inertial component when the system was sensitive to external accelery load.The theory analysis was verified by the result of FEM simulation,and the effect on structural sensitivity and natural frequency of the inertial component with changing of geometry parameters of its micro elastic beams was studied based on the conclusions above.The conclusion could be used to conduct optimization the structure design of piezoresistive accelerometer.
机译：采用MEMS压阻式加速度计的惯性组分作为研究对象，以研究通过改变其微弹束的几何参数对系统性能引起的影响。建立了机械模型，分析了惯性最大应力和位移的特性。该系统对外部加速度敏感的组件。通过FEM模拟的结果验证了理论分析，研究了与改变其微弹束的几何参数的惯性组分的结构灵敏度和自然频率的影响上述结论。结论可用于进行优化压阻式加速度计的结构设计。

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