首页> 外文会议>International conference on mechatronics technology >Ultraprecision Micromachining of Micro Lens on Roll Mold Die
【24h】

Ultraprecision Micromachining of Micro Lens on Roll Mold Die

机译:辊模模具上微透镜的超精密微加工

获取原文
获取原文并翻译 | 示例

摘要

In recent years,the demand of ultraprecision optic elements is rising with the technical development and miniaturization of information equipments.It is requested to manufacture the optic elements,like micro lens,with the technology of nanoimprint,because of high efficiency and high precision.Though the semiconductor process is used to fabricate the mold die,there are problems that it is difficult to fabricate the complex shape and to form the micro pattern on curved surface.This study aims at fabricating the roll mold die of micro lens by using ultraprecision micromachining,and examining the applicability of machined mold die.
机译:近年来,随着信息设备的技术发展和小型化,对超精密光学元件的需求不断增长。由于具有高效率和高精度,因此需要利用纳米压印技术来制造微透镜等光学元件。半导体工艺是用于制造模具的模具,存在难以制造复杂形状和难以在曲面上形成微图案的问题。本研究的目的是通过超精密微加工来制造微透镜的辊式模具,并检查机加工模具的适用性。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号