Study of methane RF (13.56MHZ) discharge created by a multihole cathode

机译：研究多孔阴极产生的甲烷RF（13.56MHZ）放电

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The present work appears in the setting of a complete study of a reactor used for a-C: H deposition. We have studied the influence of the discharge parameters (power, pressure) on the self-bias voltage and on the saturation ion current density. The characterization of the discharge is completed by a spectroscopic study, using the actinometry to determine the relative concentration of species present in the discharge (CH, H). These measurements have been made over a wide range of plasma conditions including power inputs of 50-300 W and pressures of 10-100mTorr.

机译：当前的工作出现在对用于a-C：H沉积的反应堆的全面研究的背景下。我们已经研究了放电参数（功率，压力）对自偏压和饱和离子电流密度的影响。放电的表征是通过光谱研究完成的，使用光度法确定放电中存在的物质（CH，H）的相对浓度。这些测量是在各种等离子体条件下进行的，包括50-300 W的功率输入和10-100mTorr的压力。

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《International Conference on Phenomena in Ionized Gases(ICPIG 2003) vol.1; 20030715-20; Greifswald(DE)》|2003年|P.27-28|共2页
会议地点 Greifswald(DE)
作者
S. Djerourou; M. Ouchabane; M. Zekara; L. Henni; K. Henda;
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Centre de Developpement des Technologies Avancees. Cite du 20 aout 1956, BP17 Baba Hassen, Alger. Algerie;

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原文格式 PDF
正文语种 eng
中图分类天然气加工;
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专利

1. The Effect of a Multihollow Cathode on the Self-Bias Voltage of Methane RF Discharge Used for a-C:H Deposition [J] . S. Djerourou, K. Henda, M. Djebli Journal of Modern Physics . 2011,第9期

机译：多空心阴极对用于a-C：H沉积的甲烷RF放电自偏压的影响
2. Plasma parameters of RF capacitively coupled discharge: comparative study between a plane cathode and a large hole dimensions multi-hollow cathode [J] . Djerourou Samira, Djebli Mourad, Ouchabane Mohamed The European physical journal. Applied physics . 2019,第1期

机译：射频电容耦合放电的等离子体参数：平面阴极与大孔尺寸之间的比较研究多空心阴极
3. Experimental Study on Favorable Properties of Compound RF Discharge Plasmas with a Tapered Shape Hollow Cathode Compared with a Plane Cathode [J] . KIYOYUKI YAMBE, AKIO MATSUOKA, YOSHIOMI KONDOH Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers . 2006,第11期

机译：锥形空心阴极与平面阴极相比的复合射频放电等离子体的有利特性的实验研究
4. Study of methane RF (13.56MHZ) discharge created by a multihole cathode [C] . S. Djerourou, M. Ouchabane, M. Zekara, International Conference on Phenomena in Ionized Gases . 2003

机译：用多孔阴极产生的甲烷RF（13.56MHz）放电研究
5. Electric field-enhanced catalytic conversion of methane: An experimental study on the effects of corona discharge on methane reactions. [D] . Marafee, Abdulathim M. J. 1996

机译：电场增强的甲烷催化转化：电晕放电对甲烷反应影响的实验研究。
6. Data on the effect of particle size porosity and discharging rate on the performance of lithium-ion battery with NMC 622 cathode through numerical analysis [O] . Solomon Ansah, Hyejeong Hyun, Namsoo Shin, 2021

机译：关于粒径孔隙率和放电率对NMC 622阴极性能的粒度孔隙率和放电率的影响通过数值分析
7. The Effect of a Multihollow Cathode on the Self-Bias Voltage of Methane RF Discharge Used for a-C:H Deposition [O] . S. Djerourou, K. Henda, M. Djebli 2011

机译：多空心阴极对用于a-C：H沉积的甲烷RF放电自偏压的影响

Study of methane RF (13.56MHZ) discharge created by a multihole cathode

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