Generating Mechanism of Flatness Error in Magnetic Disc Substrate Polishing

机译：磁盘基板抛光中平面度误差的产生机理

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摘要

Polishing is the most important operation to get super-smooth surface in magnetic disc substrate manufacturing. The flatness error of the substrate surface, however, may be caused mainly by this operation. With respect to the production of aluminum disc substrate with NiP plated layer, the generating mechanism of flatness error in polishing operation has been analyzed based on contact mechanics and tribology in this paper. The measures to improve the flatness were also discussed.

机译：抛光是磁盘基板制造中获得超光滑表面的最重要操作。然而，基板表面的平坦度误差可能主要由该操作引起。对于具有NiP镀层的铝制圆盘基板的生产，基于接触力学和摩擦学，分析了抛光操作中平面度误差的产生机理。还讨论了改善平面度的措施。

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来源
《International conference on precision engineering;Sino-Japan joint seminar on ultraprecision technology;ICPE;SJSUT; 19960923-25;19960923-25;19960923-25;19960923-25; Shenyang(CN);Shenyang(CN);Shenyang(CN);Shenyang(CN)》|1996年|P.30|共1页
会议地点 Shenyang(CN)
作者
Y.S. Lu; G.Q.Cai; J.S.Shi; H.W.Zheng;
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作者单位

Northeastern University /P.R.China;

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会议组织
原文格式 PDF
正文语种 eng
中图分类机械制造工艺;精密车床;
关键词
polishing; magnetic disc substrate; flatness;

机译：抛光;磁盘基板;平面度;

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4. Generating Mechanism of Flatness Error in Magnetic Disc Substrate Polishing [C] . Y.S. Lu, G.Q.Cai, J.S.Shi, International conference on precision engineering;Sino-Japan joint seminar on ultraprecision technology . 1996

机译：磁盘基板抛光中的平坦误差产生机制
5. Finishing of advanced ceramic balls for bearing applications by magnetic float polishing (MFP) involving fine polishing followed by chemo-mechanical polishing (CMP). [D] . Jiang, Ming. 1998

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Generating Mechanism of Flatness Error in Magnetic Disc Substrate Polishing

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