首页> 外文会议>International Symposium on Chemical and Biological Sensors and Analytical Methods II, 2001 >LIQUID DIELECTRIC CONSTANT MEASUREMENT BASED ON THICKNESS SHEAR MODE QUARTZ RESONATORS
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LIQUID DIELECTRIC CONSTANT MEASUREMENT BASED ON THICKNESS SHEAR MODE QUARTZ RESONATORS

机译:基于厚度剪切模式石英谐振器的液体介电常数测量

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摘要

A thickness shear mode (TSM) bulk acoustic wave (BAW) sensor for liquid dielectric constant measurements is presented. This sensor, which is configured as a resonator structure, employs a sensing electrode geometry which allows the accurate measurement of the dielectric constant of a liquid. In this study, the sensitivity of this sensor to the change in liquid dielectric constant with two different sensing electrode configurations has been determined. It is shown that the sensitivity of the sensor is dependent on the sensing electrode geometry.
机译:提出了一种用于液体介电常数测量的厚度剪切模式(TSM)体声波(BAW)传感器。被构造为谐振器结构的该传感器采用感测电极几何形状,该几何形状允许精确测量液体的介电常数。在这项研究中,已经确定了该传感器对两种不同感应电极配置下液体介电常数变化的敏感性。结果表明,传感器的灵敏度取决于感应电极的几何形状。

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