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Fabrication of lenslet grating with multilevel phases

机译:多级相位微透镜光栅的制作

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Abstract: Lenslet arrays with eight-level phases are fabricated by the method of etching and film coating, respectively. The diffraction efficiency of that component is about 80%. Two types of lenslet grating are constructed, the one is a lenslet array with a pinhole grating, and the other is a combination of two sets of lenslet arrays. The homogeneity of the array spots obtained by a lenslet grating is better than that by a single lenslet array. The fabrication process and the testing method are described, some experimental results are listed. !8
机译:摘要:分别通过刻蚀和涂膜的方法制备了具有八级相的小透镜阵列。该组分的衍射效率为约80%。构造了两种类型的小透镜光栅,一种是带有针孔光栅的小透镜阵列,另一种是两组小透镜阵列的组合。通过小透镜光栅获得的阵列点的均匀性比通过单个小透镜阵列获得的均匀。描述了其制造工艺和测试方法,并列出了一些实验结果。 !8

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