Combining Refractive Solid Immersion Lens and Pulsed Laser InducedTechniques for Effective Defect Localization on Microprocessors

机译：结合折射固体浸没透镜和脉冲激光诱导技术在微处理器上进行有效缺陷定位

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The spatial resolution and sensitivity of laser inducedrntechniques are significantly enhanced by combiningrnrefractive solid immersion lens technology and laser pulsingrnwith lock-in detection algorithm. Laser pulsing and lock-inrndetection enhances the detection sensitivity and removes thern‘tail’ artifacts due to amplifier ac-coupling response. Threerncase studies on microprocessor devices with different failurernmodes are presented to show that the enhancements made arndifference between successful and unsuccessful defectrnlocalization.

机译：通过将折射固体浸没透镜技术和激光脉冲技术与锁定检测算法相结合，可以显着提高激光诱导技术的空间分辨率和灵敏度。激光脉冲和锁定检测提高了检测灵敏度，并消除了由于放大器交流耦合响应引起的“尾部”伪影。提出了对具有不同故障模式的微处理器设备的三例研究，以表明增强功能使缺陷定位成功与失败之间存在明显的差异。

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来源
《ISTFA 2008 : Conference proceedings from the 34th international symposium for testing and failure analysis》|2008年|402-406|共5页
会议地点 Portland OR(US);Portland OR(US)
作者
A.C.T. Quah; rnS.H. Goh; rnV.K. Ravikumar; rnS.L .Phoa; rnV. Narang; rnJ.M. Chin; rnC.M. Chua; rnJ.C.H. Phang;
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作者单位

Centre for Integrated Circuit Failure Analysis and Reliability (CICFAR), National University of Singapore E-mail: quahchengteck@nus.edu.sg;

Centre for Integrated Circuit Failure Analysis and Reliability (CICFAR), National University of Singapore;

Advanced Micro Devices Pte. Ltd, Singapore;

Advanced Micro Devices Pte. Ltd, Singapore;

Advanced Micro Devices Pte. Ltd, Singapore;

Advanced Micro Devices Pte. Ltd, Singapore;

SEMICAPS Pte. Ltd., Singapore;

Centre for Integrated Circuit Failure Analysis and Reliability (CICFAR), National University of Singapore SEMICAPS Pte. Ltd., Singapore;

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1. Combining Refractive Solid Immersion Lens and Pulsed Laser-Induced Technique for Integrated Circuit Failure Analysis [J] . S. H. Goh, A. C. T. Quah, V. K. Ravikumar, Electronic Device Failure Analysis: A Resource for Technical Information and Industry Developments . 2010,第3期

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2. Three-dimensional optical data storage using a solid immersion lens to focus a femtosecond laser pulse [J] . Fengtao He, Guanghua Cheng, Xiaoqiang Feng, Chinese Optics Letters . 2004,第7期

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3. High aperture focusing through a spherical interface: Application to refractive solid immersion lens (RSIL) for subsurface imaging [J] . Szu Huat Goh, Colin J.R. Sheppard Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter . 2009,第5期

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4. Combining Refractive Solid Immersion Lens and Pulsed Laser Induced Techniques for Effective Defect Localization on Microprocessors [C] . A.C.T. Quah, S.H. Goh, V.K. Ravikumar International Symposium for Testing and Failure Analysis . 2008

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Combining Refractive Solid Immersion Lens and Pulsed Laser InducedTechniques for Effective Defect Localization on Microprocessors

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