Creation of Solid Immersion Lenses in Bulk SiliconUsing Focused Ion Beam Backside Editing Techniques

机译：使用聚焦离子束背面编辑技术在块状硅中创建固态浸没透镜

获取原文

获取原文并翻译 | 示例

页面导航

摘要
著录项
相似文献
相关主题

摘要

This work describes how Solid Immersion Lenses (SILs)can berncreated in bulk silicon using a focused ion beam and a bitmaprnmilling process.The optical properties are in good agreementrnwith the expected results for the achieved lens geometries.Anrnimprovement in lateral spatial resolution by a factor of 1.8 and inrnimage contrast by 170 %for backside analysis is demonstrated.rnThe presented SILs are 32 μm in diameter with a field of view ofrnabout 10 μm.This process can be an alternative when a regularrnSIL placement on the chip is impossible or complex.Thernadvantages of this method are the use of a single kind of materialrn(no air gaps and no additional lens material with differentrnn value),the ability to precisely position the SIL on the circuitryrnand the fact that a SIL may be created in less than twentyrnminutes of processing time.

机译：这项工作描述了如何使用聚焦离子束和位图铣削工艺在大块硅中制造固体浸没透镜（SILs），其光学性能与所获得的透镜几何形状的预期结果非常吻合。横向空间分辨率的提高是进行了1.8倍的图像分析和170％的图像反差，用于背面分析.rn提出的SIL直径为32μm，视野范围约为10μm。当无法在芯片上规则地放置SIL或复杂时，此方法可以替代。该方法使用的是一种材料（无气隙，没有其他具有不同值的透镜材料），能够将SIL精确地定位在电路上，并且可以在不到二十分钟的处理时间内生成SIL 。

著录项

来源
《ISTFA 2008 : Conference proceedings from the 34th international symposium for testing and failure analysis》|2008年|157-162|共6页
会议地点 Portland OR(US);Portland OR(US)
作者
P.Scholz; rnU.Kerst; rnC.Boit; rnC.-C.Tsao; rnT.Lundquist;
展开▼
作者单位

Berlin University of Technology,D-10587 Berlin,Germanyrnphilipp.scholz@tu-berlin.de,+49-30-314-26803;

Berlin University of Technology,D-10587 Berlin,Germany;

Berlin University of Technology,D-10587 Berlin,Germany;

DCG Systems,Fremont,CA 94538,USA;

DCG Systems,Fremont,CA 94538,USA;

展开▼
会议组织
原文格式 PDF
正文语种 eng
中图分类
关键词

相似文献

外文文献
中文文献
专利

1. Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials - An adaptive calibration algorithm [J] . P. Scholz, N. Herfurth, M. Sadowski, Microelectronics & Reliability . 2014,第9a10期

机译：各种块状半导体材料中固体浸没透镜的高效，灵活的聚焦离子束微加工-自适应校准算法
2. Optimizing focused ion beam created solid immersion lenses in bulk silicon using design of experiments [J] . P. Scholz, C. Gallrapp, U. Kerst, Microelectronics & Reliability . 2010,第9a11期

机译：使用实验设计优化聚焦离子束创建的块状硅固体浸没透镜
3. Microscopic diamond solid-immersion-lenses fabricated around single defect centers by focused ion beam milling [J] . Jamali Mohammad, Gerhardt Ilja, Rezai Mohammad, Review of Scientific Instruments . 2014,第12期

机译：通过聚焦离子束铣削在单个缺陷中心周围制造出微观金刚石固体浸没透镜
4. Creation of Solid Immersion Lenses in Bulk Silicon Using Focused Ion Beam Backside Editing Techniques [C] . P. Scholz, U. Kerst, C. Boit International Symposium for Testing and Failure Analysis . 2008

机译：使用聚焦离子束背面编辑技术在散装硅中创建固体浸没镜片
5. Adaptive optics wavefront compensation for solid immersion microscopy in backside imaging. [D] . Lu, Yang. 2014

机译：固态成像在背面成像中的自适应光学波前补偿。
6. Design and Fabrication of Microscale Thin-Film Silicon Solid Immersion Lenses for Mid-Infrared Application [O] . Gil Ju Lee, Hyun Myung Kim, Young Min Song 2020

机译：用于中红外应用的微米级薄膜硅固体浸没透镜的设计与制造
7. Microscopic diamond Solid-Immersion-Lenses fabricated around single defect ceneters by focussed ion beam milling [O] . Jamali, Mohammad, Gerhardt, Ilja, Rezai, Mohammad, 2014

机译：微观金刚石固体浸没透镜围绕单个制造通过聚焦离子束铣削来制造缺陷

Creation of Solid Immersion Lenses in Bulk SiliconUsing Focused Ion Beam Backside Editing Techniques

摘要

著录项

相似文献

相关主题

期刊订阅