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首页> 外文会议>Laser-based micro- and nanoprocessing IX >Influence of pulsed Nd~(3+): YAG laser beam profile and wavelength on micro-scribing of copper and aluminum thin films
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Influence of pulsed Nd~(3+): YAG laser beam profile and wavelength on micro-scribing of copper and aluminum thin films

机译：脉冲Nd〜（3+）：YAG激光束分布和波长对铜和铝薄膜微刻划的影响

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摘要

Evenly spaced conductive grids of copper and aluminum thin films on polyamide substrate are used for parabolic reflector-antennas, aboard telecommunications satellite. In the present paper, laser micro scribing of thin films using a flat-top and Gaussian laser beam profile are analyzed with 95% overlapping of the diameter of the laser spot. Laser scribing is performed using the Q-switched Nd~(3+): YAG (355, 532 nm) laser. The influence of laser irradiation and beam shape are experimentally analyzed using non-contact optical profilometer and scanning electron microscope (SEM). Laser scribing using flat-top profile produced near rectangular micro channels in copper thin films. Using Gaussian profile the probability of melting is greater than vaporization as observed using SEM images; this melt pool plays a prominent role in re-solidification at the edges. Depth of the scribe channel is observed to be 20% high for 532 nm wavelength compared to 355 nm wavelength. Effect of different environments such as air, water and vacuum on the channel depth and quality is reported. The response of aluminum and copper for high fluences is also studied. Theoretical modeling of the laser-material interaction using Comsol mulitphysics 4.4 is discussed.
机译：聚酰胺基板上铜和铝薄膜的均匀间隔的导电网格用于电信卫星上的抛物面反射器天线。在本文中，使用平顶和高斯激光束轮廓对薄膜进行激光微刻划，并分析了激光光斑直径的95％重叠。使用调Q的Nd〜（3+）：YAG（355，532 nm）激光器进行激光刻划。使用非接触式光学轮廓仪和扫描电子显微镜（SEM），通过实验分析了激光辐照和光束形状的影响。使用平顶轮廓的激光划片在铜薄膜的矩形微通道附近产生。使用高斯曲线，熔化的可能性大于使用SEM图像观察到的蒸发；该熔池在边缘重新凝固中起着重要作用。与355 nm波长相比，对于532 nm波长，划刻通道的深度高20％。报告了空气，水和真空等不同环境对通道深度和质量的影响。还研究了铝和铜对高通量的响应。讨论了使用Comsol多元物理4.4进行的激光与材料相互作用的理论建模。

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