首页>
外国专利>
Process for Producing Thin Films by Pulsed Excimer Laser Evaporation (PROCESS FOR MAKING THIN FILMS BY PULSED EXCIMER LASER EVAPORATION)
Process for Producing Thin Films by Pulsed Excimer Laser Evaporation (PROCESS FOR MAKING THIN FILMS BY PULSED EXCIMER LASER EVAPORATION)
展开▼
机译:通过脉冲准分子激光蒸发生产薄膜的方法(通过脉冲准分子激光蒸发制备薄膜的工艺)
展开▼
页面导航
摘要
著录项
相似文献
摘要
Discloses a method for producing a thin film of a superconducting material by applying a shock to a heated target with radiation from a pulsed high energy UV laser to form a plume of the target material and attaching the plume to the substrate.
展开▼