首页> 外国专利> Process for Producing Thin Films by Pulsed Excimer Laser Evaporation (PROCESS FOR MAKING THIN FILMS BY PULSED EXCIMER LASER EVAPORATION)

Process for Producing Thin Films by Pulsed Excimer Laser Evaporation (PROCESS FOR MAKING THIN FILMS BY PULSED EXCIMER LASER EVAPORATION)

机译:通过脉冲准分子激光蒸发生产薄膜的方法(通过脉冲准分子激光蒸发制备薄膜的工艺)

摘要

Discloses a method for producing a thin film of a superconducting material by applying a shock to a heated target with radiation from a pulsed high energy UV laser to form a plume of the target material and attaching the plume to the substrate.
机译:公开了一种用于制造超导材料薄膜的方法,该方法是利用来自脉冲高能UV激光器的辐射对被加热的靶材施加冲击,以形成靶材的羽状流并将该羽状流附着到基板上。

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