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PROCESS FOR MAKING THIN FILMS BY PULSED EXCIMER LASER EVAPORATION
PROCESS FOR MAKING THIN FILMS BY PULSED EXCIMER LASER EVAPORATION
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机译:通过脉冲准分子激光蒸发制备薄膜的方法
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摘要
A process for producing thin films of superconducting material by bombarding a heated target with radiation from pulsed high energy UV laser to form a plume of target material, and depositing the plume on a substrate is disclosed.
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