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首页> 外文期刊>Journal of microanolithography, MEMS, and MOEMS >Influence of pulsed Nd~(3+): YAG laser beam profile and wavelength on microscribing of copper and aluminum thin films
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Influence of pulsed Nd~(3+): YAG laser beam profile and wavelength on microscribing of copper and aluminum thin films

机译：脉冲Nd〜（3+）：YAG激光束分布和波长对铜和铝薄膜微刻划的影响

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Evenly spaced conductive grids of copper and aluminum thin films on polyimide substrate are used for parabolic reflector antennas aboard telecommunications satellites. Laser microscribing of thin films using a flattop and Gaussian laser beam profile is analyzed with 95% overlapping of the diameter of the laser spot. Laser scribing is performed using the Q-switched Nd~(3+): YAG (355,532 nm) laser. The influence of laser irradiation and beam shape on the scribed microchannel width, depth, and surface characteristics is experimentally analyzed using a noncontact optical profilometer and scanning electron microscope (SEM). Laser scribing using a flat-top profile produced near rectangular microchannels in copper thin films. Using the Gaussian profile, the probability of melting is greater than vaporization as observed using SEM images; this melt pool plays a prominent role in resolidification at the edges. The depth of the scribe channel is observed to be 20% higher for the 532-nm wavelength compared to the 355-nm wavelength. The effect of different environments such as air, water, and vacuum on the channel depth and quality is reported. The response of aluminum and copper thin films for high fluences is also studied. Thermal modeling of the laser-material interaction has been attempted by assuming the plasma electron temperature as the laser ablation temperature for modeling the recession rate and depth for a single laser pulse. Model results agree with experimental data showing greater depth for 532 nm compared to 355 nm.
机译：聚酰亚胺基板上的铜和铝薄膜的均匀间隔的导电网格用于电信卫星上的抛物面反射器天线。使用平顶和高斯激光束轮廓对薄膜进行激光显微划刻，分析出激光点直径重叠95％。激光刻划使用调Q的Nd〜（3+）：YAG（355,532 nm）激光进行。使用非接触式光学轮廓仪和扫描电子显微镜（SEM），通过实验分析了激光辐照和光束形状对划痕的微通道宽度，深度和表面特性的影响。使用平顶轮廓的激光划片在铜薄膜的矩形微通道附近产生。使用高斯分布，使用SEM图像观察到熔化的可能性大于蒸发的可能性。该熔池在边缘的再固化中起着重要作用。观察到，对于532 nm波长，划线通道的深度比355 nm波长高20％。报告了空气，水和真空等不同环境对通道深度和质量的影响。还研究了铝和铜薄膜对高通量的响应。通过假设等离子体电子温度为激光烧蚀温度，以模拟单个激光脉冲的衰退速率和深度，尝试进行激光与材料相互作用的热建模。模型结果与实验数据一致，实验数据显示532 nm的深度比355 nm的深度更大。

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