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首页> 外文会议>Lightmetry and Light and Optics in Biomedicine 2004; Progress in Biomedical Optics and Imaging; vol.7 no.34 >Time-average interference microscopy for vibration testing of silicon microelements
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Time-average interference microscopy for vibration testing of silicon microelements

机译：时间平均干涉显微镜用于硅微元素的振动测试

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摘要

Fast-growing applications of microelements and microsystems, including actuators and sensors, introduce pioneering requirements on their design and testing to ensure product quality and reliability. Optical whole-field experimental techniques are of particular interest because of their speed, noncontact and noncontaminating character. Vibration testing enables providing material properties at the microlevel, design validation, and the information for the manufacturing process optimization. In particular, time average two-beam interference microscopy with automated computer processing of interferograms using the temporal phase shifting (TPS) method is reviewed. The principle of retrieving the zero-order Bessel function (sinusoidal vibrations) by calibrating the contrast variation or intensity modulation of time-average recordings is presented. The influence of main experimental errors is discussed using numerical simulations and comparisons with experimental data. Exemplary results of measurements performed with active micromembranes and AFM cantilevers are presented.
机译：包括致动器和传感器在内的微元件和微系统的快速增长的应用，对其设计和测试提出了开创性的要求，以确保产品质量和可靠性。光学全场实验技术因其速度快，无接触和无污染的特性而特别受关注。振动测试可以提供微观级别的材料特性，设计验证以及制造过程优化所需的信息。特别是，回顾了使用时间相移（TPS）方法对干涉图进行自动计算机处理的时均两光束干涉显微镜。提出了通过校准时间平均记录的对比度变化或强度调制来检索零级贝塞尔函数（正弦振动）的原理。通过数值模拟和与实验数据的比较，讨论了主要实验误差的影响。给出了使用活性微膜和AFM悬臂进行测量的示例性结果。

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