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首页> 外文会议>Mechatronics and its Applications, 2009. ISMA '09 >Design, modeling and optimization of a piezoelectric pressure sensor based on thin-film PZT diaphragm contain of nanocrystalline powders
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Design, modeling and optimization of a piezoelectric pressure sensor based on thin-film PZT diaphragm contain of nanocrystalline powders

机译：基于纳米晶粉末的PZT薄膜隔膜的压电压力传感器的设计，建模和优化

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In this paper fabrication of a 0-3 ceramic/ceramic composite lead zirconate titanate, Pb(Zr0.52Ti0.48)O3 thin film has been presented and then a pressure sensor based on multilayer thin-film PZT diaphragm contain of lead zirconate titanate nanocrystalline powders was designed, modeled and optimized. This multilayer diaphragm in general acts as sensor or actuator. ANSYS was used for simulation of diaphragm. Dynamics characteristics of this multilayer diaphragm have been investigated. By this simulation the effective parameters of the multilayer PZT diaphragm for improving the performance of a pressure sensor in different ranges of pressure are optimized. The optimized thickness ratio of PZT layer to SiO2 was given in the paper to obtain the maximum deflection of the multilayer thin-film PZT diaphragm. A 0-3 ceramic/ceramic composite lead zirconate titanate, Pb(Zr0.52Ti0.48)O3 film has been developed to fabricate the pressure sensor by a hybrid sol gel process. PZT nanopowders fabricated via conventional sol gel method and uniformly dispersed in PZT precursor solution by an attrition mill. Preparing of precursor started from 2-methoxyethanol as a solvent and acetylacetone (acac) as a chelating agent. The resulting composite solution deposited onto platinized silicon by spin coating, pyrolysis at 380degC and annealed at 650degC for 30 minutes, respectively. XRD analysis shows that perovskite structure would be formed due to the presence of a significant amount of ceramic nanopowders. This texture has a good effect on piezoelectric properties of perovskite structure. The film forms a strongly bonded network and less shrinkage occurs, so the films do not crack during process. Also the aspect ratio through this process would be increased. SEM micrographs indicated that PZT films were uniform, crack free and have a composite microstructure.
机译：在本文中制备0-3陶瓷/陶瓷复合锆钛酸铅钛酸盐Pb（Zr 0.52 Ti 0.48 ）O 3 薄膜具有提出了基于锆钛酸钛酸铅纳米晶粉末的多层薄膜PZT膜片的压力传感器，并进行了建模和优化。该多层膜片通常用作传感器或致动器。 ANSYS用于膜片的仿真。已经研究了该多层隔膜的动力学特性。通过该仿真，优化了用于改善压力传感器在不同压力范围内的性能的多层PZT膜片的有效参数。给出了PZT层与SiO 2 的最佳厚度比，以获得多层薄膜PZT膜片的最大挠度。开发了一种0-3陶瓷/陶瓷复合锆钛酸铅Pb（Zr 0.52 Ti 0.48 ）O 3 膜以制造压力传感器采用混合溶胶凝胶工艺。通过常规溶胶凝胶法制备的PZT纳米粉，并通过磨碎机均匀地分散在PZT前体溶液中。前体的制备从2-甲氧基乙醇作为溶剂和乙酰丙酮（acac）作为螯合剂开始。通过旋涂，在380℃下热解并在650℃下退火30分钟将所得复合溶液沉积在镀铂硅上。 XRD分析表明，由于存在大量的陶瓷纳米粉末，将形成钙钛矿结构。这种质地对钙钛矿结构的压电性能具有良好的影响。薄膜形成牢固粘合的网络，收缩少，因此薄膜在加工过程中不会破裂。通过该过程的纵横比也将增加。 SEM显微照片表明，PZT膜均匀，无裂纹且具有复合的微观结构。

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