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Artefacts with rough surfaces for verification of optical microsensors

机译：具有粗糙表面的伪像，用于验证光学微传感器

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Optical microsensors are used to carry out a great variety of coordinate metrology tasks on micro-parts. For the testing of such sensors calibrated artefacts are needed. The existing micro-artefacts have smooth surfaces and can therefore only be used for white-light interferometry and tactile probing. For sensors based on triangulation (structured light, autofocus, confocal ...), artefacts with optically rough surfaces are needed. Consequently artefact surfaces with a small mechanical roughness but diffuse optical scattering (high optical roughness) are required. For this purpose, different production techniques to roughen smooth surfaces and to form parts having rough surfaces are tested successfully at the Physikalisch-Technische Bundesanstalt (PTB). The roughness Ra is about 0.3 μm A suitable artefact set is currently being developed in compliance with the existing standards. A first micro-artefact (micro-contour artefact) is already commercially available. By means of the developed artefacts it also becomes possible to analyze for different optical sensors the dependence between the uncertainty and the measured surface as well as the surface slope.
机译：光学微传感器用于在微零件上执行各种坐标计量任务。为了测试这种传感器，需要校准的伪像。现有的微制品具有光滑的表面，因此只能用于白光干涉测量和触觉探测。对于基于三角测量的传感器（结构光，自动聚焦，共焦...），需要具有光学粗糙表面的伪像。因此，需要具有小的机械粗糙度但具有漫射光散射（高光学粗糙度）的伪像表面。为此，在Physikalisch-Technische Bundesanstalt（PTB）成功地测试了用于使光滑表面粗糙化并形成具有粗糙表面的零件的不同生产技术。粗糙度Ra约为0.3μm。目前正在根据现有标准开发合适的伪像组。第一微制品（微轮廓制品）已经可商购。通过所开发的伪像，还可以为不同的光学传感器分析不确定性与被测表面以及表面斜率之间的依赖性。

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