MODELING PLASMA TOOLS: REACTOR AND FEATURE SCALES

机译：建模等离子工具：反应器和功能量表

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Reactor and feature scale models of plasma tools are discussed. The reactor scale model simulates reactor scale phenomena such as gas flow, plasma power addition, electromagnetics, electron and gas temperature, and gas/surface chemistry. The feature scale model uses analytical formula, neutral/charged particle fluxes and distributions, and plasma bulk properties to predict evolution and charging of the feature profile. Level-set methods are used to evolve the profile. Intermediate scale modeling are used to couple the reactor (CFD-PLASMA) and feature scale (SPEEDIE) models. The intermediate scale model calculates neutral/charged particle fluxes and distributions using semi-analytical sheath models or Monte Carlo (MC) methods. This work is supported by the NSF SBIR program (DMI-9960600).

机译：讨论了等离子体工具的反应堆和特征尺度模型。反应堆规模模型可模拟反应堆规模现象，例如气流，等离子功率增加，电磁，电子和气体温度以及气体/表面化学性质。特征尺度模型使用分析公式，中性/带电粒子通量和分布以及等离子体性质来预测特征轮廓的演变和带电。水平集方法用于发展配置文件。中规模模型用于耦合反应堆（CFD-PLASMA）和特征规模（SPEEDIE）模型。中间规模模型使用半分析鞘模型或蒙特卡洛（MC）方法计算中性粒子/带电粒子通量和分布。 NSF SBIR程序（DMI-9960600）支持这项工作。

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《International VLSI multilevel interconnection conference;VMIC》|2000年|p.243-248|共6页
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P. J. Stout; V. I. Kolobov; N. Zhou; S. Abdollahi-Alibeik; J. P. McVittie; K. C. Saraswat;
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中图分类无线电电子学、电信技术;
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MODELING PLASMA TOOLS: REACTOR AND FEATURE SCALES

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