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首页> 外文会议>Biomedical Engineering >DESIGN, FABRICATION, AND OPTIMIZATION OF A POLYMER MEMS CELL FORCE SENSOR FOR MEASURING SINGLE CELL BIOMECHANICS
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DESIGN, FABRICATION, AND OPTIMIZATION OF A POLYMER MEMS CELL FORCE SENSOR FOR MEASURING SINGLE CELL BIOMECHANICS

机译：用于测量单细胞生物力学的聚合物MEMS细胞力传感器的设计，制造和优化

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The design, analysis, fabrication, and optimization of a polymer micro-cantilever array for measurement of spatially resolved cellular adhesion forces are presented. The simple soft lithography fabrication method offers an alternative to standard silicon-based micro-cantilevers for sensor applications. Sacrificial layers were fabricated using photolithography and oxygen plasma reactive ion etching. A modified micro-transfer molding (μTM) method was used for fabrication of polymer cantilever arrays. The fabrication is simple, cost effective, and could potentially be industrialized for high scale sensor production. Finite element analysis of sensor designs was used to predict force/deflection characteristics to ensure device functionality. Based on these simulations, an optimized cantilever design was demonstrated.
机译：介绍了用于测量空间分辨的细胞粘附力的聚合物微悬臂梁阵列的设计，分析，制造和优化。简单的软光刻制造方法为传感器应用提供了标准的基于硅的微悬臂梁的替代方案。使用光刻和氧等离子体反应性离子蚀刻来制造牺牲层。改进的微传递模塑（μTM）方法用于制造聚合物悬臂阵列。该制造简单，具有成本效益，并且可以潜在地工业化以用于大规模传感器生产。传感器设计的有限元分析用于预测力/挠度特性，以确保设备功能。基于这些模拟，论证了优化的悬臂设计。

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