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首页> 外文会议>International Conference on Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology;ECTI-CON 2009 >Fabrication of QCM sensor array and PDMS micro chamber for biosensor applications
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Fabrication of QCM sensor array and PDMS micro chamber for biosensor applications

机译：用于生物传感器的QCM传感器阵列和PDMS微室的制造

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摘要

In this work, an array of quartz crystal microbalance (QCM) sensors is fabricated on a single quartz crystal substrate and attached with poly(dimethylsiloxane) (PDMS) micro chamber for using in flow-injection system. The Cr/Au electrode array is deposited on both side of quartz substrate by sputtering through electroplated microshadow mask. PDMS micro chamber was fabricated by mold casting technique with SU-8 mold. Fabricated PDMS micro chamber and QCM sensor array were attached together for using in flow-injection system. In our experiment, the QCM electrodes were coated with the carboxylic poly(vinyl chloride) (PVC-COOH) and then the carboxylic group was activated with carbodiimide hydrochloride (EDC) and N-hydroxylsuccinimide (NHS) for protein binding. The scanning electron micrograph shown the trapped protein on the modified sensing layer, it confirmed that our QCM sensor and PDMS micro chamber can be used as QCM biosensor array. This new QCM sensor array provide possibility of multiple detection in small amount of sample within a single quartz crystal substrate that avoid the error signal from the different properties of each sensor in an array.
机译：在这项工作中，在单个石英晶体基板上制造了一个石英晶体微天平（QCM）传感器阵列，并与聚二甲基硅氧烷（PDMS）微室相连，用于流动注射系统。 Cr / Au电极阵列通过电镀的微阴影掩模通过溅射沉积在石英基板的两侧。 PDMS微型腔室采用SU-8模具通过铸造技术制造。将预制的PDMS微室和QCM传感器阵列连接在一起，以用于流动注射系统。在我们的实验中，将QCM电极涂上羧基聚氯乙烯（PVC-COOH），然后用碳二亚胺盐酸盐（EDC）和N-羟基琥珀酰亚胺（NHS）活化羧基以结合蛋白质。扫描电子显微照片显示捕获的蛋白质在修饰的传感层上，这证明我们的QCM传感器和PDMS微室可用作QCM生物传感器阵列。这种新的QCM传感器阵列提供了在单个石英基板​​内对少量样品进行多次检测的可能性，从而避免了阵列中每个传感器的不同特性带来的误差信号。

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