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首页> 外文会议>IEEE International Conference on Nano/Micro Engineered and Molecular Systems >Micromachined catalytic combustion hydrogen gas sensor
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Micromachined catalytic combustion hydrogen gas sensor

机译：微机械催化燃烧氢气传感器

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A catalytic combustion H2 sensor has been fabricated by using MEMS technology. The application of hafnium oxide thin films as insulating layer has been deposited by electron beam evaporation. The semiconductor combustion catalyst tin oxide (SnO2) layer was prepared by chemical vapor deposition (CVD).It is a novel application of semiconductor material to catalytic combustion gas sensor. The resistivity of HfO2 thin film is about 2.4×1012Ω · cm at 900°C. Both the sensing elements and the reference elements could be connected in a suitable circuit such as a Wheatstone configuration with low power consumption. The catalytic combustion sensor shows high response to H2 at operating voltage of 4V and has a higher relative sensitivity and a good linearity for the concentrations of H2 ranging from 0 to 4% in volume. Good consistency and high accuracy of the micro machined catalytic combustion gas sensor were achieved.
机译：利用MEMS技术制备了催化燃烧H 2 传感器。通过电子束蒸发沉积了氧化ha薄膜作为绝缘层。通过化学气相沉积（CVD）制备了半导体燃烧催化剂氧化锡（SnO 2 ）层。这是半导体材料在催化燃烧气体传感器中的一种新型应用。 HfO 2 薄膜在900°C时的电阻率约为2.4×10 12 Ω·cm。感测元件和参考元件都可以在合适的电路中连接，例如具有低功耗的惠斯通配置。催化燃烧传感器在4V的工作电压下显示出对H 2 的高响应，并且对于H 2 的浓度（从0到4）具有较高的相对灵敏度和良好的线性。体积百分比。实现了微机械催化燃烧气体传感器的良好一致性和高精度。

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