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首页> 外文会议>IEEE International Conference on Nano/Micro Engineered and Molecular Systems >Design of a three-component force sensor based on MEMS strain gauges
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Design of a three-component force sensor based on MEMS strain gauges

机译：基于MEMS应变仪的三组件力传感器的设计

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This paper presents a three-component force sensor with MEMS gauges attached to its sensitive beams, which could be monolithically machined without assembly. All the sensitive areas of the dynamometer are designed on outer surfaces, which could contribute to the bond of gold wires onto the MEMS chips. Rough theoretical models are abstracted based on Euler beam theories, and Wheastone bridge circuits are provided according to the finite element simulations under loadings. Optimizations of dimensions are discussed to obtain isotropic sensitive outputs and minimized coupling errors. Finally with the help of simulation software, the safety factor and natural frequencies are also given. This design puts forward a solution with cost effective and maintenance friendly for both static and dynamic force measurements.
机译：本文介绍了一个三组件力传感器，其具有连接到其敏感光束的MEMS仪，这可以在没有组装的情况下单模加工。测力计的所有敏感区域都设计在外表面上，该外表面可以有助于金线的粘合到MEMS芯片上。基于欧拉光束理论提取粗糙的理论模型，并且根据装载下的有限元模拟提供了Wheashone桥接电路。讨论尺寸优化以获得各向同性敏感输出并最小化耦合误差。最后借助仿真软件，还给出了安全系数和自然频率。该设计提出了一种解决方案，具有成本效益和维护，可用于静态和动态力测量。

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