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首页> 外文会议>IEEE International Conference on Nano/Micro Engineered and Molecular Systems >Design of a three-component force sensor based on MEMS strain gauges
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Design of a three-component force sensor based on MEMS strain gauges

机译：基于MEMS应变仪的三分量力传感器设计

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This paper presents a three-component force sensor with MEMS gauges attached to its sensitive beams, which could be monolithically machined without assembly. All the sensitive areas of the dynamometer are designed on outer surfaces, which could contribute to the bond of gold wires onto the MEMS chips. Rough theoretical models are abstracted based on Euler beam theories, and Wheastone bridge circuits are provided according to the finite element simulations under loadings. Optimizations of dimensions are discussed to obtain isotropic sensitive outputs and minimized coupling errors. Finally with the help of simulation software, the safety factor and natural frequencies are also given. This design puts forward a solution with cost effective and maintenance friendly for both static and dynamic force measurements.
机译：本文提出了一种三分量力传感器，其灵敏梁上附有MEMS量规，可以在不组装的情况下进行整体加工。测功机的所有敏感区域都设计在外表面上，这可能有助于将金线粘合到MEMS芯片上。基于欧拉梁理论，建立了粗略的理论模型，并根据载荷作用下的有限元模拟，提供了Wheastone桥电路。讨论了尺寸的优化，以获得各向同性的敏感输出，并最大程度地减小了耦合误差。最后，借助仿真软件，还给出了安全系数和固有频率。该设计提出了一种既经济又易于维护的静态和动态力测量解决方案。

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