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首页> 外文学位 >Multiaxis force and torque sensing for insect flight research: Design, fabrication, calibration and testing of MEMS strain gauge sensor.
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Multiaxis force and torque sensing for insect flight research: Design, fabrication, calibration and testing of MEMS strain gauge sensor.

机译：用于昆虫飞行研究的多轴力和扭矩传感：MEMS应变仪传感器的设计，制造，校准和测试。

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摘要

Flying insects are able to perform remarkable maneuvers and flying acrobats by a deceptively simple process of beating their wings. However, a closer look at insect flight reveals highly complex and sophisticated mechanisms based on unsteady aerodynamics. The focus of this research project is to develop engineering solutions, specifically using Micro Electro Mechanical Systems (MEMS) technology, to study the aerodynamics of insect flight.;To this effect, MEMS force sensors were designed, fabricated, characterized and tested with tethered flying insects. The force sensors are microfabricated with integrated pieozresistive elements that can sense changes in strain in the structure with the idea that the flight force from a fly, tethered to the sensor, can be measured quantitatively. Force sensors were designed based on two main criterions; first that they are able to measure forces with at least two degrees of freedom and second that they are sensitive enough to measure real-time flight forces from fruit flies (Drosophila melanogaster), typically less than 20microN.;Tethered flight tests are conducted inside a specialized LED flight simulator arena that was already developed prior to this project by Michael Dickinson's group at Caltech. The force sensor measures the small multidirectional forces generated by fruit flies while simultaneously supporting it inside the arena thus providing the quantitative data that allows a better understanding of sensorimotor mechanisms of flight control in flying insects.;Elastic beam theory is revisited to formulize the governing equations for the MEMS force sensor design. Finite element models of the design are used to verify theoretically predicted values of stress and strain. The sensor is fabricated using standard bulk microfabrication processes and as such, material, design and fabrication constraints are highlighted. Several design and instrumentation techniques that increase force sensitivity for piezoresistive sensors are also discussed. A new technique that uses a nanoindenter tool for the force characterization of sensors is described. The sensors are shown to have successfully measured forces from tethered flying insects inside the flight arena. Finally, future directions for research in the area of insect flight using MEMS based force sensors are discussed, as are design changes that increase force sensitivity and allow elucidation of specific features of insect flight such as take-off and landing.
机译：飞行的昆虫能够通过看似简单的殴打其翅膀的过程进行出色的操纵和飞行的杂技演员。但是，仔细观察昆虫的飞行会发现基于不稳定空气动力学的高度复杂和复杂的机理。该研究项目的重点是开发工程解决方案，特别是使用微机电系统（MEMS）技术来研究昆虫飞行的空气动力学特性。为此，MEMS力传感器的设计，制造，表征和测试都是通过束缚飞行进行的昆虫。力传感器采用集成的压阻元件进行微制造，该元件可感测结构中的应变变化，其思想是可以定量测量拴系在传感器上的来自苍蝇的飞行力。力传感器的设计基于两个主要标准：首先，他们能够测量至少两个自由度的力;其次，它们足够灵敏，可以测量果蝇（果蝇（Drosophila melanogaster））的实时飞行力，通常小于20 microN;在室内进行系留飞行测试加州理工学院的迈克尔·迪金森（Michael Dickinson）小组在此项目之前已经开发了专用的LED飞行模拟器竞技场。力传感器可测量果蝇产生的较小的多向力，同时将其支撑在赛场内，从而提供定量数据，从而可以更好地理解飞行昆虫中飞行控制的感觉运动机理。；重新研究了弹性束理论以建立控制方程用于MEMS力传感器设计。设计的有限元模型用于验证应力和应变的理论预测值。传感器是使用标准的批量微制造工艺制造的，因此，突出了材料，设计和制造方面的限制。还讨论了几种增加压阻传感器力敏感度的设计和仪表技术。描述了一种使用纳米压头工具对传感器进行力表征的新技术。传感器显示已成功测量了来自飞行场内系留的飞行昆虫的力。最后，讨论了使用基于MEMS的力传感器在昆虫飞行领域进行研究的未来方向，以及提高力敏感度并阐明昆虫飞行特定特征（例如起飞和着陆）的设计变更。

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  • 作者

    Nasir, Mansoor.;

  • 作者单位

    University of California, Berkeley.;

  • 授予单位 University of California, Berkeley.;
  • 学科 Engineering Biomedical.;Engineering Electronics and Electrical.;Engineering Mechanical.
  • 学位 Ph.D.
  • 年度 2007
  • 页码 188 p.
  • 总页数 188
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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