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首页> 外文会议>International Conference on Electronic Packaging Technology >Design of incremental grating ruler online measuring-displacement system based on LabVIEW
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Design of incremental grating ruler online measuring-displacement system based on LabVIEW

机译：基于LabVIEW的基于LabVIEW的增量光栅尺测量 - 位移系统设计

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摘要

To accommodate the requirements of precise displacement feedback devices in micro-electronic technology, an on-line measurement system of the grating ruler is designed. This system uses a kind of virtual instrument called LabVIEW and digital image processing technology to detect the displacement, that consists of the PXI case of National Instruments, the frame grabber and the precision motion platform. The experimental tests demonstrate that in the distance range of 150 mm, the motor speed is within 1.25 mm/s, the maximum displacement error within 0.04mm. This system is simple, can be operated-controlled in real time and observed-debugged online. It's not only adapts to the measuring-displacement, but also suits the surface detection, encapsulation and other fields in the microelectronics manufacturing.
机译：为了适应微电子技术中精确位移反馈装置的要求，设计了光栅尺的在线测量系统。该系统使用一种名为LabVIEW和数字图像处理技术的虚拟仪器来检测位移，由国家仪器，框架抓斗和精密运动平台的PXI案例组成。实验试验表明，在150 mm的距离范围内，电机速度在1.25mm / s之内，在0.04mm内的最大位移误差。该系统很简单，可以实时操作控制并在线观察调试。它不仅适应测量位移，而且适用于微电子制造中的表面检测，封装和其他领域。

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