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Leading and trailing edge hot switching damage in a metal contact RF MEMS switch

机译:金属触点RF MEMS开关中的前沿和后沿热开关损坏

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This paper describes the hot switching damage in a MEMS switch contact. Under hot switched conditions, material transfer leading to contact erosion causes the performance of RF MEMS switches to degrade over their lifetime. Hot switching performance of RF MEMS switches is one of the major reliability issues and is presently affecting the marketability of these devices despite their proven advantages over solid state switches which are currently used in RF systems. The phenomena leading to such damage both at the leading and trailing edge of a switching cycle are investigated in this paper.
机译:本文介绍了MEMS开关触点中的热开关损坏。在热开关条件下,导致接触腐蚀的材料转移会导致RF MEMS开关的性能在其使用寿命内下降。 RF MEMS开关的热开关性能是主要的可靠性问题之一,尽管它们相对于目前在RF系统中使用的固态开关具有公认的优势,但它们目前仍在影响这些设备的适销性。本文研究了在开关周期的前缘和后缘导致这种损坏的现象。

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