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首页> 外文会议>IEEE International Conference on Micro Electro Mechanical Systems >Parametrically amplified resonant sensor with pseudo-cooling effect
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Parametrically amplified resonant sensor with pseudo-cooling effect

机译：具有伪冷却效果的参数放大谐振传感器

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摘要

In this paper, a resonating infrared (IR) sensor with the capability of deamplifying thermal noises based on mechanical parametric amplification is reported. A single-crystalline silicon resonator is formed at the edge of an IR absorber that is freely suspended by narrow beams, and the resonant frequency of the resonator is changed by both heat conduction and thermal stress in irradiating IR radiation. An electrode for electrostatically vibrating near the resonant frequency is integrated, and two electrodes for electrostatically exciting parametric amplification are also formed nearby the resonator. We propose a scheme in which the frequency fluctuation of the mechanical vibration can be reduced by noise-squeezing involved in parametric amplification under an appropriate condition, resulting in improving the noise equivalent power (NEP) and normalized detectivity (D*). In this research, the prototype of thermal resonant IR sensors is fabricated in order to verify the scheme of the noise-squeezing, and parametric resonance with the noise-squeezing in the resonator is conformed and fundamental characteristics of the prototype is reported.
机译：在本文中，报道了具有基于机械参数放大的具有Deamplify的热噪声能力的谐振红外（IR）传感器。在通过窄光束自由悬挂的IR吸收器的边缘处形成单晶硅谐振器，并且通过在照射IR辐射中的热导热和热应力来改变谐振器的谐振频率。在谐振频率附近静电振动的电极被整合，并且在谐振器附近也形成了用于静电参数放大的两个电极。我们提出了一种方案，其中通过在适当的条件下参与参数放大中涉及的噪声挤压可以减少机械振动的频率波动，从而改善了噪声等效功率（NEP）和归一化检测率（D *）。在该研究中，制造了热谐振IR传感器的原型，以验证噪声挤压的方案，并且通过谐振器中的噪声挤压的参数谐振是符合的，并且报道了原型的基本特征。

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