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Process Modeling and Fabrication of Microlens Array in Thick Photoresist

机译:厚光致抗蚀剂微型阵列的过程建模和制造

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In this work, the design and fabrication of a low f-number cylindrical microlens array is presented. The lenses were fabricated in thick photo resist of 12 μm thickness, using a contact printer exposure through a mask with a repetitive 6 μm line - 4 μm space pattern. Numerical calculations based on scalar diffraction theory were employed to model the light propagation inside the resist, determining the aerial image as a function of its thickness. Than the resist response characteristics, expressed by its contrast curve, and absorption rate were used to obtain a cross section profile. A good match between numerical and experimental results were found.
机译:在这项工作中,提出了低F数圆柱微透镜阵列的设计和制造。使用具有重复6μm线 - 4μm空间图案的掩模,厚度为12μm厚度的厚度为12μm厚度的厚度的镜片制造。基于标量衍射理论的数值计算用于模拟抗蚀剂内的光传播,确定空中图像作为其厚度的函数。而不是由对比度曲线表示的抗蚀剂响应特性,并且使用吸收率来获得横截面轮廓。发现了数值和实验结果之间的良好匹配。

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