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首页> 外文会议>International Conference on Microelectronics >Bacterial immobilization and detection using porous silicon platform and CMOS sensory circuit
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Bacterial immobilization and detection using porous silicon platform and CMOS sensory circuit

机译：使用多孔硅平台和CMOS传感电路进行细菌固定和检测

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The paper presents the design of MEMS-based sensory system for real-time bacteria detection. The principle of functioning is based on monitoring the variation in capacitance signals owing to the adherence of target bacteria to the sensing interface. The system is designed using custom-based technology and it consists of comb finger capacitor structures made out of doped polysilicon. Aiming at improving the detection efficiency, the space between the comb fingers, forming the two electrodes of the capacitive sensor, will be made porous through a post-processing with Xenon Difluoride (XeF2) dry etching technique. This allows entrapping bacteria in between the electrodes thus increasing the variation of capacitance. This latter, is acquired using a Charge Based Capacitance Measurement (CBCM) sensory circuit built with to the 0.13 µm CMOS technology. The circuit is able to detect a difference in capacitance as low as 0.75 fF.
机译：本文介绍了用于实时细菌检测的基于MEMS的传感系统的设计。功能原理基于监视由于目标细菌粘附到传感界面而引起的电容信号变化。该系统采用基于定制技术的设计，由掺杂多晶硅制成的梳状指电容器结构组成。为了提高检测效率，通过使用二氟化氙（XeF2）干法刻蚀技术进行后处理，可以使形成电容式传感器两个电极的梳齿之间的空间变得多孔。这允许在电极之间截留细菌，从而增加了电容的变化。后者是使用基于0.13 µm CMOS技术构建的基于电荷的电容测量（CBCM）传感电路获得的。该电路能够检测到低至0.75 fF的电容差异。

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