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Roughness evaluation of very smooth surfaces using a novel method of scatter measurement

机译：利用散射测量新方法粗糙度评价非常平滑的表面

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A roughness measurement method based on the application of a photodiode integrator for scattered radiation gathering as well as results of experiments concerning this method are presented in the paper. The new integrator, contrary to known optical integrating devices, provides the possibility to get much less expensive and smaller instruments than traditional ones. Unfortunately, a decrease of the integrator dimensions could restrict its spatial frequency bandwidth causing measurement errors. Therefore, experimental works have been performed to find the relation between the range-of-acceptance angle of the integrator and measured rms roughness. They have been done by constructing a model of the integrator and a complete TIS instrument as well as a precision experimental set. For the purpose of making a direct comparison between the new instrument and the existing one, the Ulbricht sphere has also been used in the set. For very smooth surfaces, the value of the lower angle range is very critical and should be smaller than 2 deg. The upper limit can be about 30 deg. for measurement of smooth and isotropic surfaces. At such limits, the influence of the integrator flatness is stated to be non-substantial. Results of surface roughness measurements obtained from the new unit and the Ulbricht sphere show that both methods have similar issues. Taking into account the dimensions of the photodiode integrator, a small and inexpensive TIS instrument can be designed for measuring roughness and reflectance of isotropic smooth surfaces in the optical and electronic industries.© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
机译：纸张中提出了一种基于散射辐射聚集器的光电二极管积分器的粗糙度测量方法以及该方法的实验结果。与已知的光学集成设备相反，新集成器提供比传统方式更便宜且较小的仪器的可能性。不幸的是，积分器尺寸的减少可以限制其空间频率带宽导致测量误差。因此，已经进行了实验性，以找到积分器的接受角度与测量的RMS粗糙度之间的关系。通过构建集成商和完整的TIS仪器以及精密实验集来完成它们。为了直接比较新仪器和现有的仪器和现有的目的，该集合也已使​​用了Ulbricht球体。对于非常光滑的表面，较低角度范围的值非常关键并且应小于2°。上限可以是大约30°。用于测量光滑和各向同性表面。在这样的限度下，将积分器平整度的影响表示为非实质性。从新单元获得的表面粗糙度测量结果和Ulbricht领域的结果表明，两种方法都有类似的问题。考虑到光电二极管积分器的尺寸，可以设计小而廉价的TIS仪器，用于测量光学和电子行业各向同性光滑表面的粗糙度和反射率。©（2012）照片光学仪表工程师的版权协会（SPIE） 。仅供个人使用的摘要下载。

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