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首页> 外文期刊>Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter >In situ surface roughness measurement using a laser scattering method
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In situ surface roughness measurement using a laser scattering method

机译：使用激光散射法原位测量表面粗糙度

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In this paper, the design and development of an optical probe for in situ measurement of surface roughness are discussed. Based on this light scattering principle, the probe which consists of a laser diode, measuring lens and a linear photodiode array, is designed to capture the scattered light from a test surface with a relatively large scattering angle phi (=28degrees). This capability increases the measuring range and enhances repeatability of the results. The coaxial arrangement that incorporates a dual-laser beam and a constant compressed air stream renders the proposed system insensitive to movement or vibration of the test surface as well as surface conditions. Tests were conducted on workpieces which were mounted on a turning machine that operates with different cutting speeds. Test specimens which underwent different machining processes and of different surface finish were also studied. The results obtained demonstrate the feasibility of surface roughness measurement using the proposed method. (C) 2003 Published by Elsevier Science B.V. [References: 24]
机译：在本文中，讨论了用于表面粗糙度原位测量的光学探头的设计和开发。基于这种光散射原理，设计了一种由激光二极管，测量透镜和线性光电二极管阵列组成的探头，用于捕获来自测试表面的散射光，散射角phi（= 28°）相对较大。此功能扩大了测量范围并增强了结果的可重复性。结合了双激光束和恒定压缩空气流的同轴布置使所提出的系统对测试表面的移动或振动以及表面条件不敏感。对安装在车床上的工件进行了测试，该车以不同的切割速度运行。还研究了经受不同加工工艺和不同表面光洁度的试样。获得的结果证明了使用所提出的方法测量表面粗糙度的可行性。 （C）2003年由Elsevier Science B.V.出版[参考文献：24]

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