2D Photonic Crystal Patterning for High Volume LED Manufacturing

机译：2D光子晶体图案化适用于大容量LED制造

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Due to their small dimensions when used for visible light, the patterning of photonic crystals has only been possible with costly electron beam lithography and low throughput R&D and pilot production grade imprint lithography. This paper will focus on results from a high throughput imprint tool capable of processing over 20 wafers per hour on 50-100mm sapphire, GaAs, SiC, Ge and metal substrates. An overview of the process used as well as the results of patterning photonic crystal patterns on sapphire wafers and etching them into a SiO2 hard mask will be presented. Finally an analysis of the cost of ownership which currently stands at ~

机译：由于它们的尺寸小用于可见光时，光子晶体的图案化仅具有昂贵的电子束光刻和低通量研发和试验级印记光刻。本文将专注于高吞吐量印记工具的结果，该工具能够在50-100mm蓝宝石，GaAs，SiC，GE和金属基板上加工每小时20多个晶圆。将概述使用的过程以及在蓝宝石晶片上进行图案化光子晶体图案的结果并将其蚀刻成SiO2硬掩模。最后分析目前代表〜的所有权成本

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来源
《International Conference on Solid State Lighting》|2006年||共10页
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作者
Rob Hershey; Mike Miller; Chris Jones; Mahadevan Ganapathi Subramanian; Xiaoming Lu; Gary Doyle; David Lentz; Dwayne LaBra;
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原文格式 PDF
正文语种
中图分类电气照明;
关键词
Photonic Crystal; LED; Imprint Lithography; Manufacturing;

机译：光子晶体;LED;印记光刻;制造业;

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1. Fabrication of 2D photonic crystals using block copolymer patterns on as grown LEDs [J] . Alam M.M., Kim J.-Y., Jung W.-G. Journal of Colloid and Interface Science . 2011,第2期

机译：在成长的LED上使用嵌段共聚物图案制造2D光子晶体
2. UV enhanced substrate conformal imprint lithography (UV-SCIL) technique for photonic crystals patterning in LED manufacturing [J] . Ran Ji, Michael Hornung, Marc A. Verschuuren, Microelectronic Engineering . 2010,第5a8期

机译：UV增强基板保形压印光刻（UV-SCIL）技术用于LED制造中的光子晶体图案化
3. Enhanced light extraction of InGaN-based green LEDs by nano-imprinted 2D photonic crystal pattern [J] . B S Cheng, C H Chiu, K J Huang, Semiconductor science and technology . 2008,第5期

机译：纳米压印二维光子晶体图案增强了基于InGaN的绿色LED的光提取
4. 2D Photonic Crystal Patterning for High Volume LED Manufacturing [C] . Rob Hershey, Mike Miller, Chris Jones, Sixth International Conference on Solid State Lighting . 2006

机译：用于大批量LED制造的2D光子晶体图案
5. Rapid generation of integrated circuit patterns and high-fidelity fabrication of 3D photonic crystals. [D] . Zhao, Lin. 2010

机译：集成电路图案的快速生成和3D光子晶体的高保真度制造。
6. Recognition-Mediated Particle Detection Under Microfluidic Flow with Waveguide-Coupled 2D Photonic Crystals: Towards Integrated Photonic Virus Detectors [O] . J. E. Baker, R. Sriram, B. L. Miller -1

机译：波导耦合的二维光子晶体在微流体流下的识别介导的粒子检测：朝集成光子病毒检测器。
7. Recognition-mediated particle detection under microfluidic flow with waveguide-coupled 2D photonic crystals: towards integrated photonic virus detectors [O] . James E. Baker, Rashmi Sriram, Benjamin L. Miller 2017

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2D Photonic Crystal Patterning for High Volume LED Manufacturing

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