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An unique sample pretreatment method for circuit edit on WLCSP devices

机译:在WLCSP器件上进行电路编辑的独特样品预处理方法

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In the present work, the thick organic passivation layer of WLCSP products was uniformly removed before the focused ion beam (FIB) circuit edit (CE) process. By this approach, the cycle time of the whole CE process can be remarkably decreased and the successful rate can be effectively increased. In addition, the suggested flows for successful CE under solder bumps and RDLs have been proposed.
机译:在当前工作中,在聚焦离子束(FIB)电路编辑(CE)工艺之前,已均匀去除WLCSP产品的厚有机钝化层。通过这种方法,可以显着减少整个CE过程的周期时间,并可以有效地提高成功率。另外,已经提出了在焊料凸点和RDL下成功获得CE的建议流程。

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