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Development of integrated vibratory-gyroscopes based on photonic bandgap materials

机译：基于光子带隙材料的集成振动陀螺仪的开发

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This work focuses on a Micro-Opto-Electro-Mechanical (MOEM) vibratory gyroscope which operates in resonant condition. A custom technology performed through the adoption of a Silicon On Insulator (SOI) substrate has been considered for the development of the inertial sensor. The optical readout has been realized by using metal dielectric multilayer photonic band gap materials (PBGs). This optical structure, composed of alternating layers of one metal and one dielectric material, has been deposited on the surface of the micromachined device obtaining reflection properties function of the displacement of the proof mass induced by an external angular velocity. Theoretical and experimental investigations of metal-dielectric one dimensional PBG structures applied in a SOI-MOEM prototype have been performed, showing the improvement of the proposed approach with respect to the classical strategies.
机译：这项工作的重点是在共振条件下工作的微光电机电（MOEM）振动陀螺仪。对于惯性传感器的开发，已经考虑通过采用绝缘体上硅（SOI）基板执行的定制技术。通过使用金属介电多层光子带隙材料（PBG）实现了光学读出。该光学结构由一种金属和一种介电材料的交替层组成，已沉积在微加工设备的表面上，从而获得由外部角速度引起的检测质量位移的反射特性函数。已经对应用于SOI-MOEM原型的金属-电介质一维PBG结构进行了理论和实验研究，显示了相对于经典策略所提出的方法的改进。

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