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首页> 外文期刊>Instrumentation and Measurement, IEEE Transactions on >Fabrication and Characterization of an MOEMS Gyroscope Based on Photonic Bandgap Materials
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Fabrication and Characterization of an MOEMS Gyroscope Based on Photonic Bandgap Materials

机译：基于光子带隙材料的MOEMS陀螺仪的制作与表征

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This paper focuses on a micro-optoelectro-mechanical vibratory gyroscope that provides an optical output and operates in a resonant condition. A custom fabrication technology, based on a silicon-on-insulator substrate, has been considered for the development of the inertial sensor. The optical readout has been accomplished using a metal-dielectric multilayer photonic bandgap (PBG) material. Such an optical structure, composed of alternated layers of one metal and one dielectric material, is embedded in the micromachined device, thus obtaining reflection properties correlated with the displacement of the proof mass induced by the external angular velocity. The principle of the micromachined gyroscope is first introduced, and then, the microelectromechanical gyroscope structure, the materials properties, and the fabrication technology are illustrated. Numerical analyses have also been performed in order to gain insight into the micromachined device. Furthermore, the optical transduction principle that exploits metal-dielectric 1-D PBG structures has been investigated from both a theoretical and an experimental point of view.
机译：本文着重于提供光输出并在共振条件下工作的微光机电振动陀螺仪。为了开发惯性传感器，已经考虑了基于绝缘体上硅衬底的定制制造技术。光学读出已使用金属电介质多层光子带隙（PBG）材料完成。这种由一种金属和一种介电材料的交替层组成的光学结构嵌入微机械装置中，从而获得与由外部角速度引起的检测质量位移相关的反射特性。首先介绍了微机械陀螺仪的原理，然后阐述了微机电陀螺仪的结构，材料性能和制造工艺。还进行了数值分析，以深入了解微加工设备。此外，已经从理论和实验的角度研究了利用金属介电的一维PBG结构的光转导原理。

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