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首页> 外文期刊>IEEE Transactions on Instrumentation and Measurement >Design, Fabrication, and Characterization of BESOI-Accelerometer Exploiting Photonic Bandgap Materials
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Design, Fabrication, and Characterization of BESOI-Accelerometer Exploiting Photonic Bandgap Materials

机译：利用光子带隙材料的BESOI加速度计的设计，制造和表征

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摘要

This paper reports the numerical and experimental investigation of a bulk and etch silicon on insulator optoelectromechanical system realized using a multilayer metal-dielectric photonic bandgap (PBG) structure. A specific optical structure is designed, which embeds an air gap; the acceleration to be measured induces displacements into a proof mass that in turn are transduced as variations in the optical reflectance spectrum of the PBG stack. The PBG optical stack is made of metals and dielectrics. Because of the large difference in the refractive indexes between these two classes of materials, the resulting optical properties of PBG transparent metals allow for obtaining a sharp change in the output signal even for very small changes of the air gap and therefore of the relative positions of the proof mass. The microelectromechanical system consists of a suspended square-shaped mass supported by four crab-leg beams; the central part is used as active optical area where the light beam is to be focused. The advantages of silicon micromachining combined with PBG properties have been addressed. The sensor proposed has been initially analytically modeled and numerically studied using CoventorWare. Then the device has been fabricated and an extensive experimental campaign has been performed.
机译：本文报道了使用多层金属-电介质光子带隙（PBG）结构实现的在绝缘体光电系统上的块状和刻蚀硅的数值和实验研究。设计了特定的光学结构，该结构嵌入了气隙；要测量的加速度将位移引入标准质量，然后将其转换为PBG堆栈的光反射光谱的变化。 PBG光学堆栈由金属和电介质制成。由于这两类材料之间的折射率差异很大，因此，即使气隙变化很小，因此PBG透明金属的相对位置也很小，因此PBG透明金属所产生的光学特性可实现输出信号的急剧变化。证明质量。微机电系统由悬浮的方形质量块组成，该质量块由四个蟹腿形梁支撑。中心部分用作光束要聚焦的有源光学区域。已经解决了硅微加工结合PBG特性的优点。最初建议的传感器已使用CoventorWare进行了分析建模和数值研究。然后，已经制造出该装置并进行了广泛的实验。

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