Non-destructive defect detection for MEMS devices using transient thermography

机译：使用瞬态热成像技术的MEMS器件无损检测

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This paper investigates the use of transient infrared thermography in a transmission mode for subsurface defect detection within thin multilayer structures such as those found in MEMS devices. This was undertaken through the use of finite element analysis based simulations for several sizes of defects and for several combinations of substrate and thin film materials. The maximum temperature difference observable at the sample surface between defective and non-defective regions of the sample was investigated as a function of various parameters of the sample materials and defect geometry.

机译：本文研究了在透射模式下使用瞬态红外热成像技术在诸如MEMS器件中发现的薄多层结构中进行亚表面缺陷检测的方法。这是通过使用基于有限元分析的几种缺陷尺寸以及基材和薄膜材料的几种组合进行的模拟来完成的。研究了样品的有缺陷和无缺陷区域之间在样品表面可观察到的最大温差，它是样品材料和缺陷几何形状的各种参数的函数。

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《Electronic System-Integration Technology Conference》|2016年|1-7|共7页
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Xiaoting Wang; David C. Whalley; Vadim V. Silberschmidt;
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Substrates; Micromechanical devices; Transient analysis; Nonhomogeneous media; Temperature distribution; Heating; Temperature measurement;

机译：基板;微机械装置;瞬态分析;非均匀介质;温度分布;加热;温度测量;

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专利

1. Non-destructive characterisation of defects in devices using infrared thermography [J] . A. Kaminski, J. Jouglar, C. Volle Microelectronics Journal . 1999,第11期

机译：使用红外热像仪对设备中的缺陷进行非破坏性表征
2. Thermography Sequence Processing and Defect Edge Identification of TBC Structure Debonding Defects Detection Using Long-Pulsed Infrared Wave Non-Destructive Testing Technology [J] . Bu Chiwu, Sun Zhihui, Tang Qingju, Russian Journal of Nondestructive Testing . 2019,第1期

机译：TBC结构剥离缺陷检测的热成像序列处理和缺陷边缘识别使用长脉冲红外波非破坏性测试技术检测
3. Two-stream convolutional neural network for non-destructive subsurface defect detection via similarity comparison of lock-in thermography signals [J] . Yanpeng Cao, Yafei Dong, Yanlong Cao, NDT & E international . 2020,第Juna期

机译：通过锁定热成像信号相似性比较的两流卷积神经网络进行无损地下缺陷检测
4. Non-destructive defect detection for MEMS devices using transient thermography [C] . Xiaoting Wang, David C. Whalley, Vadim V. Silberschmidt Electronic System-Integration Technology Conference . 2016

机译：使用瞬态热成像对MEMS器件的非破坏性缺陷检测
5. Defect Detection on Rail Base Area Using Infrared Thermography [D] . Shrestha, Survesh. 2020

机译：缺陷检测轨道基面积使用红外热成像
6. Microfluidic and Micromachined/MEMS Devices for Separation, Discrimination and Detection of Airborne Particles for Pollution Monitoring [O] . Daniel Puiu Poenar 2015

机译：微流体和微加工/ MEMS装置，用于分离，鉴别和检测空气中的颗粒物，以进行污染监测
7. Non-destructive defect detection for MEMS devices using transient thermography [O] . David C. Whalley, Vadim V. Silberschmidt 2016

机译：使用瞬态热成像对MEMS器件的非破坏性缺陷检测

Non-destructive defect detection for MEMS devices using transient thermography

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