Overview and Analysis of Readout Circuits for Capacitive Sensing in MEMS Gyroscopes (MEMS Angular Velocity Sensors)

机译：MEMS陀螺电容感应读出电路的概述和分析（MEMS角速度传感器）

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In the article, overview and analysis of the performance of capacitive sensing circuits for MEMS gyroscopes are presented. Their performance, advantages and disadvantages are given. The low-noise chopper stabilized readout circuit for capacitive measurements in MEMS gyroscopes is proposed.

机译：在物品中，提出了MEMS陀螺仪的电容式感测电路性能的概述和分析。给出了他们的表现，优缺点。提出了用于MEMS陀螺仪中电容测量的低噪声斩波器稳定读出电路。

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《International Conference on Perspective Technologies and Methods in MEMS Design》|2009年||共3页
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作者
Mykhaylo Lobur; Andriy Holovatyy;
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原文格式 PDF
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中图分类 T-53;
关键词
MEMS (MicroElectroMechanical Systems); MEMS gyroscope; Capacitive sensing circuit; Continous-time voltage sensing; Switched-capacitor charge integrator for capacitive sensing; Continuous-time current-mode capacitive sensing;

机译：MEMS（微机电系统）;MEMS陀螺;电容传感电路;连续电压感应;开关电容电荷积分器;用于电容传感;连续时间电流模式电容感应;
入库时间 2022-08-20 21:29:06

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2. A 97 dB dynamic range CSA-based readout circuit with analog temperature compensation for MEMS capacitive sensors [J] . Yin Tao, Zhang Chong, Wu Huanming, Journal of Semiconductors . 2013,第11期

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3. Analysis and Elimination of the Capacitive Feedthrough Current on Electrostatically Actuated and Sensed Resonance-Based MEMS Sensors [J] . Mustafa Kangül, Eren Aydin, Furkan Gökçe, Microelectromechanical Systems, Journal of . 2017,第6期

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4. Overview and Analysis of Readout Circuits for Capacitive Sensing in MEMS Gyroscopes (MEMS Angular Velocity Sensors) [C] . Mykhaylo Lobur, Andriy Holovatyy International Conference on Perspective Technologies and Methods in MEMS Design . 2009

机译：MEMS陀螺电容感应读出电路的概述和分析（MEMS角速度传感器）
5. Capacitive sensor interface circuits for MEMS transducers with application to high-temperature data acquisition. [D] . Lei, Shuyu. 2001

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6. Design of Readout Circuit with Quadrature Error and Auxiliary PLL for MEMS Vibratory Gyroscope [O] . Hua Chen, Yanqing Zhong 2020

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7. MEMS capacitive pressure sensor monolithically integrated with CMOS readout circuit by using post CMOS processes [O] . 2017

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Overview and Analysis of Readout Circuits for Capacitive Sensing in MEMS Gyroscopes (MEMS Angular Velocity Sensors)

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