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首页> 外文期刊>Microelectromechanical Systems, Journal of >Analysis and Elimination of the Capacitive Feedthrough Current on Electrostatically Actuated and Sensed Resonance-Based MEMS Sensors
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Analysis and Elimination of the Capacitive Feedthrough Current on Electrostatically Actuated and Sensed Resonance-Based MEMS Sensors

机译：基于静电驱动和感测谐振的MEMS传感器上的电容馈通电流的分析和消除

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This paper presents the investigation of two different capacitive feedthrough current elimination methods with an analysis of the effect of the capacitive feedthrough current on the resonance characteristics of electrostatically actuated and sensed resonant MEMS sensors. Electrostatically actuated and sensed resonators have various applications, such as accelerometers, gyroscopes, mass sensors, and temperature sensors. In most of these applications, as sensitivity increases, gain decreases. The capacitive feedthrough current between the drive and sense electrodes disturbs the resonance characteristics of the resonator, especially when the gain is rather small. In order to eliminate the dominating feedthrough current in such cases, two methods were proposed. In the first method, differential input signals were applied to two separate resonators, one active and one passive, sharing the same sense electrode. Although this method seems to be easily applicable to all types of resonators, this study has shown that mismatches between the resonator pair prevent perfect elimination of the feedthrough current. In the second method, a novel lateral electrostatic resonator with differential sense electrodes was designed and fabricated to eliminate the feedthrough current. Measurements showed that the feedthrough effect was successfully eliminated and 27 times higher SNRdB was achieved with this method. Moreover, it was successfully demonstrated that any mismatch can be compensated by a simple resistive adjustment.
机译：本文介绍了两种不同的电容性馈通电流消除方法，并分析了电容性馈通电流对静电激励和感测谐振MEMS传感器的谐振特性的影响。静电驱动和感测谐振器具有各种应用，例如加速度计，陀螺仪，质量传感器和温度传感器。在大多数这些应用中，随着灵敏度的提高，增益会降低。驱动电极与感测电极之间的电容性馈通电流会干扰谐振器的谐振特性，尤其是在增益很小时。为了消除这种情况下的主要馈通电流，提出了两种方法。在第一种方法中，差分输入信号被施加到两个单独的谐振器，一个共用一个感应电极，一个有源和一个无源谐振器。尽管这种方法似乎很容易适用于所有类型的谐振器，但这项研究表明，谐振器对之间的失配会阻止完全消除馈通电流。在第二种方法中，设计并制造了一种新型的带有差分感应电极的横向静电谐振器，以消除馈通电流。测量表明，该方法成功消除了馈通效应，并获得了27倍的高SNRdB。此外，成功地证明了任何失配都可以通过简单的电阻调节来补偿。

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