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A CMOS MEMS Resonant Magnetic field Sensor with differential Electrostatic actuation and Capacitive sensing

机译：CmOs mEms谐振磁场传感器，具有差分静电驱动和电容传感

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Farooq Ahmad; John Ojur Dennis; Mohd Haris; Md Khir;
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年度 2015
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2. An optimal design of thermal-actuated and piezoresistive-sensed CMOS-MEMS resonant sensor [J] . Chun-Chieh Wang, Chun-Yin Tsai, Tsung-Lin Chen, Journal of Micromechanics and Microengineering . 2013,第11期

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3. Analysis and Elimination of the Capacitive Feedthrough Current on Electrostatically Actuated and Sensed Resonance-Based MEMS Sensors [J] . Mustafa Kangül, Eren Aydin, Furkan Gökçe, Microelectromechanical Systems, Journal of . 2017,第6期

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4. A CMOS MEMS Resonant Magnetic field Sensor with differential Electrostatic actuation and Capacitive sensing [C] . Farooq Ahmad, John Ojur Dennis, Mohd Haris Md Khir, International Conference on MEMS, NANO and Smart Systems . 2012

机译：CMOS MEMS共振磁场传感器，具有差动静电致动和电容感应
5. Sensing and control electronics design for capacitive CMOS-MEMS inertial sensors. [D] . Sun, Hongzhi. 2011

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6. Differential Wide Temperature Range CMOS Interface Circuit for Capacitive MEMS Pressure Sensors [O] . Yucai Wang, Vamsy P. Chodavarapu 2015

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7. Design of electrostatic actuators for suppressing vertical disturbances of CMOS-MEMS capacitive force sensors in bio applications [O] . Reza Jalil Mozhdehi, Ali Selk Ghafari, Amir A.A. Khayyat 2015

机译：静电致动器的设计抑制BIO应用中CMOS-MEMS电容式传感器垂直扰动的静电致动器

A CMOS MEMS Resonant Magnetic field Sensor with differential Electrostatic actuation and Capacitive sensing

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