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Design and development of spin coating system

机译：旋涂系统的设计与开发

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This paper describes the conception and the construction of a low cost spin coating machine incorporating inexpensive electronic components and open-source technology based on Arduino platform. We present and discuss the details of the electrical, mechanical and control parts. This system will coat thin film in a micro level thickness and the microcontroller ATM 328 circuit controls and adjusts the spinning speed. We prepare thin films with good uniformity for various thicknesses by this spin coating system. The thickness and uniformity of deposited films were verified by determining electronic absorption spectra. We show that thin film thickness depends on the spin speed in the range of 2000-3500 rpm. We compare the results obtained on TiO layers deposited by our developed system to those grown by using a standard commercial spin coating systems.
机译：本文介绍了一种低成本旋涂机的概念和结构，该旋涂机结合了廉价的电子元件和基于Arduino平台的开源技术。我们介绍并讨论电气，机械和控制部件的细节。该系统将以微米级的厚度涂覆薄膜，微控制器的ATM 328电路控制并调节旋转速度。通过这种旋涂系统，我们可以制备出具有各种厚度的均匀性的薄膜。通过确定电子吸收光谱来验证沉积膜的厚度和均匀性。我们表明，薄膜厚度取决于2000-3500 rpm范围内的旋转速度。我们将通过我们开发的系统沉积的TiO层与使用标准商业旋涂系统生长的TiO层上获得的结果进行比较。

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