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首页> 外文会议>International IEEE/EMBS Conference on Neural Engineering >Fabrication of all-silicon carbide neural interfaces
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Fabrication of all-silicon carbide neural interfaces

机译：全碳化硅神经接口的制造

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A significant and recognized problem in implantable neural recording and stimulation probes is operational lifetime. It is well known that both electrophysiological recording and, to a lesser extent, stimulation probes suffer severe performance degradation over periods ranging from months to a few years. Performance degradation of implantable probes arises due to a number of factors, including systemic host response, glial scarring, cellular responses to non-inert materials and, importantly, probe material degradation and delamination. SiC has superior chemical inertness and molecule barrier properties that result in insulation endurance for long term applications in bodily fluids. We present a microfabrication process that employs both insulating and conducting silicon carbide thin films to produce a novel type of implantable neural probes which present no heterogenous material interfaces to the biological environment. The exterior of our devices is composed of seamless transitions between doped and insulating SiC, completely encapsulating metal traces necessary to reduce track resistivity. The fabrication process is specifically designed such that the only interfaces presented to the extracellular fluid are made entirely from SiC, thus rendering these arrays very resistant to long-term delamination and interface failure. This process presents an important path towards neural implants for truly chronic applications; the fabrication method can be readily applied to most variants of electrophysiological recording probes.
机译：植入式神经记录和刺激探头中的一个重要且公认的问题是使用寿命。众所周知，电生理记录和在较小程度上的刺激探针在数月至数年的时间内都会遭受严重的性能下降。可植入探针的性能下降是由于多种因素引起的，包括全身宿主反应，神经胶质瘢痕形成，对非惰性材料的细胞反应，以及重要的是探针材料的降解和分层。 SiC具有出色的化学惰性和分子阻隔性能，可为体液中的长期应用提供持久的绝缘性。我们提出了一种微加工过程，该过程采用绝缘和导电碳化硅薄膜来产生一种新型的可植入神经探针，该探针不存在与生物环境的异质材料界面。我们设备的外部由掺杂和绝缘SiC之间的无缝过渡组成，完全封装了降低走线电阻率所需的金属走线。专门设计制造工艺，使得呈现给细胞外液的唯一界面完全由SiC制成，因此使这些阵列非常耐长期分层和界面破坏。这个过程为真正的长期应用提供了一条通往神经植入物的重要途径。该制造方法可以容易地应用于电生理记录探针的大多数变体。

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