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ZBA31: an advanced mask writer meeting the demands of the 1-gigabit DRAM generation

机译：ZBA31：满足1 GB DRAM一代需求的高级掩模写入器

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Abstract: Abstract not available.!0

机译：摘要：摘要不可用。！0

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《Photomask and X-Ray Mask Technology II》|1995年|p.204-206|共3页
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Christian Ehrlich; Jenoptik Technologie GmbH; Jena; Federal Republic of Germany; Olaf Fortagne; Jenoptik Technologie GmbH; Jena; Federal Republic of Germany; Peter Hahmann; Jenoptik Technologie GmbH; Jena; Federal Republic of Germany.;
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中图分类无线电电子学、电信技术;
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