Abstract: The holographic information transferred from photoresist master to replica is the relief groove depth. Many properties of the replica are related to groove depth of master, so to control the groove depth of photoresist master is important. In this paper, a novel method is adopted to obtain the value of the phase modulation by measuring diffraction light intensity of the photoresist master, since there is a certain relationship between groove depth and phase modulation, so the groove depth can be obtained indirectly.!4
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