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首页> 外文会议>Electronics, Circuits and Systems, 2001. ICECS 2001. The 8th IEEE International Conference on >High frequency threshold improvement of electro-static micro-relays
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High frequency threshold improvement of electro-static micro-relays

机译：静电微继电器的高频阈值改善

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摘要

This paper describes one of the ways of building micromechanical threshold transducers based on unique dielectric and mechanic properties of anodic alumina Functional components of such transducers carry thin-film conductive elements formed by vacuum evaporation and are formed with precise accuracy offered by methods of planar microelectronic technology. All structural elements of the transducers are fabricated in a single monolithic substrate, which greatly reduces errors and complexity of assembly work. The possibility is demonstrated of making micromechanical threshold transducers with universal design of converter element of anodic alumina, which ensures high sensitivity to variations in geometric size, acting force, acceleration, and temperature.
机译：本文介绍了一种基于阳极氧化铝独特的介电和力学特性构建微机械阈值换能器的方法之一，这种换能器的功能组件带有通过真空蒸发形成的薄膜导电元件，并以平面微电子技术的方法提供的精确精度形成。 。换能器的所有结构元件都制造在单个整体式基板中，这大大减少了错误和组装工作的复杂性。证明了制造具有阳极氧化铝转换元件通用设计的微机械阈值传感器的可能性，这确保了对几何尺寸，作用力，加速度和温度变化的高度敏感性。

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