The challenge to record correct fast WLR monitoring data from productive wafers and to set reasonable limits

机译：记录来自生产晶圆的正确的快速WLR监测数据并设置合理的极限的挑战

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Fast WLR-Monitoring measurements on productive wafers are strongly time restricted. Essential reliability results must be recorded in seconds. This issue places constraints on the stress method development and also on the assessment of the fast WLR (fWLR) data. In this paper some critical areas of reliability risks covered by fWLR Monitoring are addressed in terms of stress measurement, restricted test structure area, correct raw data screening and the possibility of lifetime/product target quantification. fWLR Monitoring methods can support process qualification and reasonable reliability limits can be a essential part of it. The reliability stress measurements discussed in this work are all employed in high volume production worldwide for various technology families from 0.09/spl mu/m to 1/spl mu/m, for logic and memory processes.

机译：在生产晶圆上进行快速WLR监控测量受到时间的严格限制。基本可靠性结果必须以秒为单位记录。此问题对应力方法的开发以及快速WLR（fWLR）数据的评估都施加了约束。本文从应力测量，有限的测试结构区域，正确的原始数据筛选以及寿命/产品目标量化的可能性等方面解决了fWLR Monitoring涵盖的一些可靠性风险的关键领域。 fWLR监控方法可以支持过程认证，合理的可靠性限制可能是其中的重要组成部分。这项工作中讨论的可靠性应力测量已在全球范围内的大量生产中采用，其逻辑和存储过程的技术范围从0.09 / spl mu / m到1 / spl mu / m。

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《Reliability Physics Symposium Proceedings, 2004. 42nd Annual》|2004年|p.661-662|共2页
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Martin; A.; Fazekas; J.; Pietsch; A.; Muth; W.;
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中图分类物理学;
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integrated circuit reliability; integrated circuit testing; logic circuits; semiconductor storage; stress measurement; record correct fast WLR monitoring data; productive wafers; set reasonable limits; strongly time restricted; reliability results; stress method development; reliability risks; stress measurement; restricted test structure area; correct raw data screening; lifetime/product target quantification; memory processes; logic processes; 0.09 to 1 micron;

机译：集成电路可靠性;集成电路测试;逻辑电路;半导体存储;应力测量;记录正确的快速WLR监视数据;生产晶片;设置合理的限制;严格限制时间;可靠性结果;应力方法的开发;可靠性风险;应力测量;限制性测试结构面积;正确的原始数据筛选;寿命/产品目标定量;内存过程;逻辑过程; 0.09至1微米;

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The challenge to record correct fast WLR monitoring data from productive wafers and to set reasonable limits

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