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Influence of deposition chamber pressure and substrate temperature on the properties of fluorescent blue and phosphorescent red OLED deposited by OVPD

机译：沉积室压力和衬底温度对OVPD沉积的荧光蓝色和磷光红色OLED性能的影响

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Organic light-emitting diodes (OLED) offer the potential to replace conventional light sources such as incandescent bulbs and fluorescent tubes. The question which thin-film technology is most favorable to produce OLED on an industrial scale is still unanswered. The most established technology for the deposition of small-molecule organic layers is vacuum thermal evaporation. A comparably novel technology is organic vapor phase deposition (OVPD), which offers some unique features in terms of adjustable process parameters such as deposition chamber pressure (P) and substrate temperature (T_S). The impact of these parameters on the morphology of organic single layers as well as on the performance of OLED is mostly unknown. In this work, phosphorescent red OLED were produced with different TS and a strong influence on the device efficiency was found. Atomic force microscopy measurements were conducted to investigate the morphology of the hole injection and hole transport layers of the devices deposited at different T_S. In addition to this, the influence of T_S and P on the performance of fluorescent blue OLED and the morphology of organic single layers was tested. By varying TS and P for the emission layer only, current efficiencies in the range from 4.3 to 6.8 cd/A were found despite the fact that all devices had the same structure. Atomic force microscopy measurements conducted on organic single layers which were deposited at the same process conditions showed rms values ranging from 1.4 to 57 nm.
机译：有机发光二极管（OLED）提供了替代传统光源（如白炽灯泡和荧光灯管）的潜力。哪种薄膜技术最适合以工业规模生产OLED的问题仍未得到解答。沉积小分子有机层的最成熟技术是真空热蒸发。相对较新的技术是有机气相沉积（OVPD），它在可调节的工艺参数（例如沉积室压力（P）和衬底温度（T_S））方面具有一些独特的功能。这些参数对有机单层形态以及对OLED性能的影响几乎是未知的。在这项工作中，生产了具有不同TS的磷光红色OLED，并且发现了对器件效率的强烈影响。进行了原子力显微镜测量，以研究在不同T_S下沉积的器件的空穴注入层和空穴传输层的形态。除此之外，还测试了T_S和P对荧光蓝OLED性能和有机单层形态的影响。仅通过改变发射层的TS和P，尽管所有器件都具有相同的结构，但发现电流效率在4.3至6.8 cd / A的范围内。在相同工艺条件下沉积的有机单层上进行的原子力显微镜测量显示，均方根值在1.4至57 nm范围内。

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