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首页> 外文会议>2006 BIMW >Morphological Changes and Plume Deflection Effect During Pulsed laser Ablation deposition of Al
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Morphological Changes and Plume Deflection Effect During Pulsed laser Ablation deposition of Al

机译：Al的脉冲激光烧蚀沉积过程中的形貌变化和羽流偏斜效应

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摘要

The morphological changes and corresponding plume deflection effect during long laser (XeCl excimer laser, λ=308 nm, τ=30 ns) irradiation of Al target have been investigated,and results showed that, a the number of laser pulses per site increases, the target morphology changes and produces a visible deviation of the plasma plume up to 5°. Scanning electron spectroscopy analys of the target surface related the plume deflection angle to the target morphology and the number of laser pulses per site. Typically well-defined columnar structures oriented along the laser beam direction were observed on the target surface. The plume created during the laser ablation was clearly visible to the naked eye and was recorded by a digital camera. Detailed studies were also performed on the ablation rate at different laser fluences (4.6 J/cm~2-12.5 J/cm~2). The morphologies and the thickness of the Al thin films deposited on Si substrates during the present laser ablation experiments were also studied. Finally, the scenario explaining the formation of columnar structure on target surface responsible for the plume deflection effect will be discussed.
机译：研究了铝靶长激光（XeCl准分子激光，λ= 308 nm，τ= 30 ns）辐照期间的形貌变化和相应的羽偏效应，结果表明，每个位点的激光脉冲数量增加，目标形态发生变化，并产生等离子羽流的可见偏差，最大偏差为5°。靶表面的扫描电子光谱分析将羽偏角与靶形态和每个部位的激光脉冲数相关。通常在目标表面上观察到沿激光束方向定向的轮廓分明的柱状结构。激光烧蚀过程中产生的烟流肉眼可见，并由数码相机记录。还对不同激光注量（4.6 J / cm〜2-12.5 J / cm〜2）下的烧蚀率进行了详细研究。还研究了在本激光烧蚀实验中沉积在Si衬底上的Al薄膜的形貌和厚度。最后，将讨论解释负责羽流偏转作用的目标表面上的柱状结构的形成的情况。

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