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Effect of subdicing on the dispersion and resonance behavior of elastic guided waves in 1D array ultrasound transducers

机译:细分对一维阵列超声换能器中弹性导波的色散和共振行为的影响

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1D array ultrasound subdicing is a common fabrication practice to avoid the presence of lateral modes near the center frequency of the transducer. The objective of this study is to theoretically analyze the effect of subdicing depth and width on the dispersion and resonance behavior of elastic guided wave propagation in 1D array transducers. The transducer is modeled as a periodic structure with the representative cell composed of one element. A semi-analytical finite-element (SAFE) method is derived to obtain the dispersion curves, group velocity and resonance mode shapes of a piezoelectric structure with arbitrary cross-section and periodic boundary conditions. Results indicate that resonant modes can occur at cutoff frequencies (wavenumber k = 0), where the phase velocity is infinite. Moreover, another interesting resonance behavior at zero-group-velocity (ZGV) points (wavenumber k ≠ 0) is observed where the phase velocity is finite. Theoretical results show that subdicing increases the number of waveguide modes, lowers the cut-off frequencies, increases the number of ZGV points and lowers the group velocities for flexural and extensional modes. Lower values of subdicing depth tend to increase the cut-off frequencies, but subdicing width has a minor effect on the dispersion curves. These important changes of the dispersion behavior are likely to influence the resonance characteristics and the bandwidth of the transducer. The analysis presented in this study provides a useful tool to optimize the design of 1D array ultrasound transducers and to gain better understanding of the complicated acoustic behavior of 1D array ultrasound transducers
机译:一维阵列超声细分是一种常见的制造实践,可避免在换能器的中心频率附近出现横向模式。这项研究的目的是从理论上分析细分深度和宽度对一维阵列换能器中弹性导波传播的色散和共振行为的影响。换能器被建模为周期结构,其代表单元由一个元素组成。推导了半解析有限元(SAFE)方法,以得到具有任意横截面和周期性边界条件的压电结构的色散曲线,群速度和共振模式形状。结果表明,共振模式可以在截止频率(波数k = 0)处发生,其中相速度是无限的。此外,在相速度有限的零组速度(ZGV)点(波数k≠0)处观察到另一种有趣的共振行为。理论结果表明,细分增加了波导模式的数量,降低了截止频率,增加了ZGV点的数量,并降低了弯曲模式和拉伸模式的群速度。较小的细分深度值往往会增加截止频率,但细分宽度对色散曲线的影响较小。色散行为的这些重要变化可能会影响换能器的谐振特性和带宽。本研究中提供的分析为优化一维阵列超声换能器的设计以及更好地理解一维阵列超声换能器的复杂声学特性提供了有用的工具

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